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Journal: MicromachinesVolume: 16Number: 976
Article: Study on Nano-Grinding Characteristics and Formation Mechanism of Subsurface Damage in Monocrystalline Silicon
  • Authors:
  • Haipeng Yan1,†,
  • Haining Zhang2,† and
  • Siyuan Cao1,*
  • et al.
Link: https://www.mdpi.com/2072-666X/16/9/976

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