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Journal: Micromachines, 2025
Volume: 16
Number: 976

Article: Study on Nano-Grinding Characteristics and Formation Mechanism of Subsurface Damage in Monocrystalline Silicon
Authors: by Haipeng Yan, Haining Zhang, Siyuan Cao and Chao Wang
Link: https://www.mdpi.com/2072-666X/16/9/976

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