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Journal: Micromachines, 2025
Volume: 16
Number: 647
Article:
Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices
Authors:
by
Raju Patel, Manoj Singh Adhikari, Deepak Bansal and Tanmoy Majumder
Link:
https://www.mdpi.com/2072-666X/16/6/647
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