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Journal: Micromachines, 2025
Volume: 16
Number: 615

Article: I–V Characteristics and Electrical Reliability of Metal–SixNy–Metal Capacitors as a Function of Nitrogen Bonding Composition
Authors: by Tae-Min Choi, Eun-Su Jung, Jin-Uk Yoo, Hwa-Rim Lee, Songhun Yoon and Sung-Gyu Pyo
Link: https://www.mdpi.com/2072-666X/16/6/615

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