Choi, T.-M.; Jung, E.-S.; Yoo, J.-U.; Lee, H.-R.; Yoon, S.; Pyo, S.-G.
I–V Characteristics and Electrical Reliability of Metal–SixNy–Metal Capacitors as a Function of Nitrogen Bonding Composition. Micromachines 2025, 16, 615.
https://doi.org/10.3390/mi16060615
AMA Style
Choi T-M, Jung E-S, Yoo J-U, Lee H-R, Yoon S, Pyo S-G.
I–V Characteristics and Electrical Reliability of Metal–SixNy–Metal Capacitors as a Function of Nitrogen Bonding Composition. Micromachines. 2025; 16(6):615.
https://doi.org/10.3390/mi16060615
Chicago/Turabian Style
Choi, Tae-Min, Eun-Su Jung, Jin-Uk Yoo, Hwa-Rim Lee, Songhun Yoon, and Sung-Gyu Pyo.
2025. "I–V Characteristics and Electrical Reliability of Metal–SixNy–Metal Capacitors as a Function of Nitrogen Bonding Composition" Micromachines 16, no. 6: 615.
https://doi.org/10.3390/mi16060615
APA Style
Choi, T.-M., Jung, E.-S., Yoo, J.-U., Lee, H.-R., Yoon, S., & Pyo, S.-G.
(2025). I–V Characteristics and Electrical Reliability of Metal–SixNy–Metal Capacitors as a Function of Nitrogen Bonding Composition. Micromachines, 16(6), 615.
https://doi.org/10.3390/mi16060615