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Journal: Micromachines, 2025
Volume: 16
Number: 568

Article: An Improved YOLOv5 Model for Lithographic Hotspot Detection
Authors: by Mu Lin, Wenjing He, Jiale Liu, Fencheng Li, Jun Luo and Yijiang Shen
Link: https://www.mdpi.com/2072-666X/16/5/568

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