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Journal: Micromachines, 2025
Volume: 16
Number: 568
Article:
An Improved YOLOv5 Model for Lithographic Hotspot Detection
Authors:
by
Mu Lin, Wenjing He, Jiale Liu, Fencheng Li, Jun Luo and Yijiang Shen
Link:
https://www.mdpi.com/2072-666X/16/5/568
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