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Journal: MicromachinesVolume: 16Number: 548
Article: Development of a Piezoelectric-Driven XYθz Nano-Positioning Stage with High Load-Bearing Capacity Enabled by Over-Constrained Guiding Configuration
  • Authors:
  • Bin Liu1,
  • Lingchen Meng2 and
  • Shuaishuai Lu3
  • et al.
Link: https://www.mdpi.com/2072-666X/16/5/548

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