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Journal: Micromachines, 2025
Volume: 16
Number: 548
Article:
Development of a Piezoelectric-Driven XYθz Nano-Positioning Stage with High Load-Bearing Capacity Enabled by Over-Constrained Guiding Configuration
Authors:
by
Bin Liu, Lingchen Meng, Shuaishuai Lu, Fei Wang, Pengbo Liu and Peng Yan
Link:
https://www.mdpi.com/2072-666X/16/5/548
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