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Journal: Micromachines, 2025
Volume: 16
Number: 548

Article: Development of a Piezoelectric-Driven XYθz Nano-Positioning Stage with High Load-Bearing Capacity Enabled by Over-Constrained Guiding Configuration
Authors: by Bin Liu, Lingchen Meng, Shuaishuai Lu, Fei Wang, Pengbo Liu and Peng Yan
Link: https://www.mdpi.com/2072-666X/16/5/548

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