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Journal: Micromachines, 2025
Volume: 16
Number: 541
541
Article: Extreme Ultraviolet Multilayer Defect Profile Parameters Reconstruction via Transfer Learning with Fine-Tuned VGG-16
Authors: by Hala Mohammad, Jiawei Li, Bochao Li, Jamilu Tijjani Baraya, Sana Kone, Zhenlong Zhao, Xiaowei Song and Jingquan Lin
Link: https://www.mdpi.com/2072-666X/16/5/541

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