Zhou, J.; Zhang, Q.; Sun, H.; Jin, C.; Zhou, J.; Liu, J.
Frequency-Decoupled Dual-Stage Inverse Lithography Optimization via Hierarchical Sampling and Morphological Enhancement. Micromachines 2025, 16, 515.
https://doi.org/10.3390/mi16050515
AMA Style
Zhou J, Zhang Q, Sun H, Jin C, Zhou J, Liu J.
Frequency-Decoupled Dual-Stage Inverse Lithography Optimization via Hierarchical Sampling and Morphological Enhancement. Micromachines. 2025; 16(5):515.
https://doi.org/10.3390/mi16050515
Chicago/Turabian Style
Zhou, Jie, Qingyan Zhang, Haifeng Sun, Chuan Jin, Ji Zhou, and Junbo Liu.
2025. "Frequency-Decoupled Dual-Stage Inverse Lithography Optimization via Hierarchical Sampling and Morphological Enhancement" Micromachines 16, no. 5: 515.
https://doi.org/10.3390/mi16050515
APA Style
Zhou, J., Zhang, Q., Sun, H., Jin, C., Zhou, J., & Liu, J.
(2025). Frequency-Decoupled Dual-Stage Inverse Lithography Optimization via Hierarchical Sampling and Morphological Enhancement. Micromachines, 16(5), 515.
https://doi.org/10.3390/mi16050515