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Journal: Micromachines, 2025
Volume: 16
Number: 454
454
Article: A Novel AlN/Sc_0.2Al_0.8N-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone
Authors: by Fansheng Meng, Chaoshuai Zhang, Guojun Zhang, Renxin Wang, Changde He, Yuhua Yang, Jiangong Cui, Wendong Zhang and Licheng Jia
Link: https://www.mdpi.com/2072-666X/16/4/454

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