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Journal: MicromachinesVolume: 16Number: 454
Article: A Novel AlN/Sc0.2Al0.8N-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone
- Authors:
- Fansheng Meng,
- Chaoshuai Zhang and
- Guojun Zhang
- et al.
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