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Journal: Micromachines, 2025
Volume: 16
Number: 157
157
Article: Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays
Authors: by Jiahao Chen, Xiaohui Yang, Mustaqim Siddi Que Iskhandar, Md. Kamrul Hasan, Shilby Baby, Muhammad Hasnain Qasim, Dennis Löber, Shujie Liu, Roland Donatiello, Steffen Liebermann, Guilin Xu and Hartmut Hillmer
Link: https://www.mdpi.com/2072-666X/16/2/157

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