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Journal: MicromachinesVolume: 16Number: 1375
Article: Fabrication of Sub-50 nm Three-Dimensional Rhombic Zero-Depth PDMS Nanopores with Enhanced Conductance via Silicon Micro-Blade Molding
- Authors:
- Mohammad Matin Behzadi1,
- Philippe Renaud2 and
- Mojtaba Taghipoor1,*
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