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Curvilinear Sub-Resolution Assist Feature Placement Through a Data-Driven U-Net Model
 
 

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Journal: Micromachines, 2025
Volume: 16
Number: 1301

Article: A Two-Stage Unet Framework for Sub-Resolution Assist Feature Prediction
Authors: by Mu Lin, Le Ma, Lisong Dong and Xu Ma
Link: https://www.mdpi.com/2072-666X/16/11/1301

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