Xian, C.; Kuang, P.; Fu, N.; Li, Z.; Wang, C.; Zhang, Y.; Zhou, R.; Wen, G.; Fan, B.; Huang, Y.
Fabrication Process Research for Silicon-Waveguide-Integrated Cavity Optomechanical Devices Using Magnesium Fluoride Protection. Micromachines 2025, 16, 1217.
https://doi.org/10.3390/mi16111217
AMA Style
Xian C, Kuang P, Fu N, Li Z, Wang C, Zhang Y, Zhou R, Wen G, Fan B, Huang Y.
Fabrication Process Research for Silicon-Waveguide-Integrated Cavity Optomechanical Devices Using Magnesium Fluoride Protection. Micromachines. 2025; 16(11):1217.
https://doi.org/10.3390/mi16111217
Chicago/Turabian Style
Xian, Chengwei, Pengju Kuang, Ning Fu, Zhe Li, Changsong Wang, Yi Zhang, Rudi Zhou, Guangjun Wen, Boyu Fan, and Yongjun Huang.
2025. "Fabrication Process Research for Silicon-Waveguide-Integrated Cavity Optomechanical Devices Using Magnesium Fluoride Protection" Micromachines 16, no. 11: 1217.
https://doi.org/10.3390/mi16111217
APA Style
Xian, C., Kuang, P., Fu, N., Li, Z., Wang, C., Zhang, Y., Zhou, R., Wen, G., Fan, B., & Huang, Y.
(2025). Fabrication Process Research for Silicon-Waveguide-Integrated Cavity Optomechanical Devices Using Magnesium Fluoride Protection. Micromachines, 16(11), 1217.
https://doi.org/10.3390/mi16111217
