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Journal: Micromachines, 2024
Volume: 15
Number: 1065
1065
Article: Development of Highly Sensitive and Thermostable Microelectromechanical System Pressure Sensor Based on Array-Type Aluminum–Silicon Hybrid Structures
Authors: by Min Li, Yang Xiao, Jiahong Zhang, Qingquan Liu, Xianglong Jiang and Wenhao Hua
Link: https://www.mdpi.com/2072-666X/15/9/1065

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