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Journal: MicromachinesVolume: 15Number: 616
Article: Temperature-Decoupled Single-Crystal MgO Fiber-Optic Fabry–Perot Vibration Sensor Based on MEMS Technology for Harsh Environments
- Authors:
- Chengxin Su,
- Pinggang Jia* and
- Aihao Zhao
- et al.
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