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Journal: Micromachines, 2023
Volume: 14
Number: 1725
Article:
Design Guidelines for Thin Diaphragm-Based Microsystems through Comprehensive Numerical and Analytical Studies
Authors:
by
Vinod Belwanshi, Kedarnath Rane, Vibhor Kumar and Bidhan Pramanick
Link:
https://www.mdpi.com/2072-666X/14/9/1725
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