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Journal: MicromachinesVolume: 14Number: 1056
Article: Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces
  • Authors:
  • Taisei Kiriyama,
  • Kenichiro Shimazaki and
  • Rihachiro Nakashima
  • et al.
Link: https://www.mdpi.com/2072-666X/14/5/1056

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