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Journal: Micromachines, 2023
Volume: 14
Number: 1056

Article: Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces
Authors: by Taisei Kiriyama, Kenichiro Shimazaki, Rihachiro Nakashima and Hidetoshi Takahashi
Link: https://www.mdpi.com/2072-666X/14/5/1056

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