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Journal: Micromachines, 2023
Volume: 14
Number: 895
Article:
Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology
Authors:
by
Danil Naumenko, Alexey Tkachenko, Igor Lysenko and Andrey Kovalev
Link:
https://www.mdpi.com/2072-666X/14/4/895
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