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Journal: Micromachines, 2023
Volume: 14
Number: 853
Article:
Experimental Study on Shear Rheological Polishing of Si Surface of 4H-SiC Wafer
Authors:
by
Peng Li, Julong Yuan, Minghui Zhu, Jianxing Zhou and Binghai Lyu
Link:
https://www.mdpi.com/2072-666X/14/4/853
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