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Journal: Micromachines, 2023
Volume: 14
Number: 853

Article: Experimental Study on Shear Rheological Polishing of Si Surface of 4H-SiC Wafer
Authors: by Peng Li, Julong Yuan, Minghui Zhu, Jianxing Zhou and Binghai Lyu
Link: https://www.mdpi.com/2072-666X/14/4/853

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