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Journal: Micromachines, 2023
Volume: 14
Number: 847
847
Article: Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review
Authors: by Alessandro Gemelli, Marco Tambussi, Samuele Fusetto, Antonio Aprile, Elisabetta Moisello, Edoardo Bonizzoni and Piero Malcovati
Link: https://www.mdpi.com/2072-666X/14/4/847

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