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Journal: Micromachines, 2023
Volume: 14
Number: 587

Article: Femtosecond Laser Processing Assisted SiC High-Temperature Pressure Sensor Fabrication and Performance Test
Authors: by You Zhao, Yulong Zhao, Lukang Wang, Yu Yang and Yabing Wang
Link: https://www.mdpi.com/2072-666X/14/3/587

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