Li, T.; Zhang, L.; Geng, W.; He, J.; Rao, Y.; Huo, J.; Yan, K.; Chou, X.
Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer. Micromachines 2023, 14, 210.
https://doi.org/10.3390/mi14010210
AMA Style
Li T, Zhang L, Geng W, He J, Rao Y, Huo J, Yan K, Chou X.
Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer. Micromachines. 2023; 14(1):210.
https://doi.org/10.3390/mi14010210
Chicago/Turabian Style
Li, Tao, Le Zhang, Wenping Geng, Jian He, Yongkang Rao, Jiabing Huo, Kunxian Yan, and Xiujian Chou.
2023. "Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer" Micromachines 14, no. 1: 210.
https://doi.org/10.3390/mi14010210
APA Style
Li, T., Zhang, L., Geng, W., He, J., Rao, Y., Huo, J., Yan, K., & Chou, X.
(2023). Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer. Micromachines, 14(1), 210.
https://doi.org/10.3390/mi14010210