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Journal: Micromachines, 2023
Volume: 14
Number: 157
157
Article: Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator
Authors: by Yuanhang Qu, Tiancheng Luo, Zhiwei Wen, Min Wei, Xiyu Gu, Xiang Chen, Yang Zou, Yao Cai, Yan Liu and Chengliang Sun
Link: https://www.mdpi.com/2072-666X/14/1/157

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