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Journal: Micromachines, 2022
Volume: 13
Number: 1550

Article: AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
Authors: by Yichen Liu, Lihao Wang, Yongquan Su, Yuyao Zhang, Yang Wang and Zhenyu Wu
Link: https://www.mdpi.com/2072-666X/13/9/1550

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