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Journal: MicromachinesVolume: 13Number: 1546
Article: Optimal Growth Conditions for Forming c-Axis (002) Aluminum Nitride Thin Films as a Buffer Layer for Hexagonal Gallium Nitride Thin Films Produced with In Situ Continual Radio Frequency Sputtering
- Authors:
- Wei-Sheng Liu1,*,
- Balaji Gururajan1 and
- Sui-Hua Wu1
- et al.
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