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Journal: Micromachines, 2022
Volume: 13
Number: 1546
1546
Article: Optimal Growth Conditions for Forming c-Axis (002) Aluminum Nitride Thin Films as a Buffer Layer for Hexagonal Gallium Nitride Thin Films Produced with In Situ Continual Radio Frequency Sputtering
Authors: by Wei-Sheng Liu, Balaji Gururajan, Sui-Hua Wu, Li-Cheng Huang, Chung-Kai Chi, Yu-Lun Jiang and Hsing-Chun Kuo
Link: https://www.mdpi.com/2072-666X/13/9/1546

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