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Journal: Micromachines, 2022
Volume: 13
Number: 995
995
Article: High-Precision Regulation of Nano-Grating Linewidth Based on ALD
Authors: by Yaxin Zhang, Chenying Wang, Weixuan Jing, Song Wang, Yujing Zhang, Liangliang Zhang, Yijun Zhang, Nan Zhu, Yunxiang Wang, Yifan Zhao, Qijing Lin and Zhuangde Jiang
Link: https://www.mdpi.com/2072-666X/13/7/995

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