Su, J.; Fichtner, S.; Ghori, M.Z.; Wolff, N.; Islam, M.R.; Lotnyk, A.; Kaden, D.; Niekiel, F.; Kienle, L.; Wagner, B.;
et al. Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates. Micromachines 2022, 13, 783.
https://doi.org/10.3390/mi13050783
AMA Style
Su J, Fichtner S, Ghori MZ, Wolff N, Islam MR, Lotnyk A, Kaden D, Niekiel F, Kienle L, Wagner B,
et al. Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates. Micromachines. 2022; 13(5):783.
https://doi.org/10.3390/mi13050783
Chicago/Turabian Style
Su, Jingxiang, Simon Fichtner, Muhammad Zubair Ghori, Niklas Wolff, Md. Redwanul Islam, Andriy Lotnyk, Dirk Kaden, Florian Niekiel, Lorenz Kienle, Bernhard Wagner,
and et al. 2022. "Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates" Micromachines 13, no. 5: 783.
https://doi.org/10.3390/mi13050783
APA Style
Su, J., Fichtner, S., Ghori, M. Z., Wolff, N., Islam, M. R., Lotnyk, A., Kaden, D., Niekiel, F., Kienle, L., Wagner, B., & Lofink, F.
(2022). Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates. Micromachines, 13(5), 783.
https://doi.org/10.3390/mi13050783