Article Versions Notes

Su J, Fichtner S, Ghori MZ, Wolff N, Islam MR, Lotnyk A, Kaden D, Niekiel F, Kienle L, Wagner B, et al. Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates. Micromachines. 2022; 13(5):783. https://doi.org/10.3390/mi13050783

Su, Jingxiang, Simon Fichtner, Muhammad Zubair Ghori, Niklas Wolff, Md. Redwanul Islam, Andriy Lotnyk, Dirk Kaden, Florian Niekiel, Lorenz Kienle, Bernhard Wagner, and et al. 2022. "Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates" Micromachines 13, no. 5: 783. https://doi.org/10.3390/mi13050783

Su, J., Fichtner, S., Ghori, M. Z., Wolff, N., Islam, M. R., Lotnyk, A., Kaden, D., Niekiel, F., Kienle, L., Wagner, B., & Lofink, F. (2022). Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates. Micromachines, 13(5), 783. https://doi.org/10.3390/mi13050783