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Journal: Micromachines, 2022
Volume: 13
Number: 676
Article:
Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates
Authors:
by
Fabian Merbeler, Sonja Wismath, Marco Haubold, Christian Bretthauer and Mario Kupnik
Link:
https://www.mdpi.com/2072-666X/13/5/676
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