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Journal: Micromachines, 2022
Volume: 13
Number: 186
Article:
A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure
Authors:
by
Mingwei Chen, Anxiang Zhong, Yulan Lu, Jian Chen, Deyong Chen and Junbo Wang
Link:
https://www.mdpi.com/2072-666X/13/2/186
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