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Journal: Micromachines, 2022
Volume: 13
Number: 2252
Article:
Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit
Authors:
by
Xinlin Peng, Yucheng Ji, Shuo Chen, Song Guo, Liuhaodong Feng, Yang Xu and Shinan Wang
Link:
https://www.mdpi.com/2072-666X/13/12/2252
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