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Journal: Micromachines, 2022
Volume: 13
Number: 2160

Article: Polishing Performance and Removal Mechanism of Core-Shell Structured Diamond/SiO2 Abrasives on Sapphire Wafer
Authors: by Guangen Zhao, Yongchao Xu, Qianting Wang, Jun Liu, Youji Zhan and Bingsan Chen
Link: https://www.mdpi.com/2072-666X/13/12/2160

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