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Journal: Micromachines, 2022
Volume: 13
Number: 2121
Article:
Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision
Authors:
by
Xingbao Liu, Xiaoting Rui, Liang Mi, Qiang Tang, Heng Chen and Yangqiu Xia
Link:
https://www.mdpi.com/2072-666X/13/12/2121
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