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Micromachines2022, 13(12), 2044;https://doi.org/10.3390/mi13122044

Journal: MicromachinesVolume: 13Number: 2044

Article: Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible

K_{e f f}^{2}

Authors:
Laixia Nian¹,
Yang Zou¹ and
Chao Gao¹
et al.

Link: https://www.mdpi.com/2072-666X/13/12/2044

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