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Journal: Micromachines, 2022
Volume: 13
Number: 2044
Article:
Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible
Authors:
by
Laixia Nian, Yang Zou, Chao Gao, Yu Zhou, Yuchen Fan, Jian Wang, Wenjuan Liu, Yan Liu, Jeffrey Bowoon Soon, Yao Cai and Chengliang Sun
Link:
https://www.mdpi.com/2072-666X/13/12/2044
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