Xiu, X.; Yang, H.; Ji, M.; Lv, H.; Zhang, S.
Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array. Micromachines 2022, 13, 1979.
https://doi.org/10.3390/mi13111979
AMA Style
Xiu X, Yang H, Ji M, Lv H, Zhang S.
Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array. Micromachines. 2022; 13(11):1979.
https://doi.org/10.3390/mi13111979
Chicago/Turabian Style
Xiu, Xueying, Haolin Yang, Meilin Ji, Haochen Lv, and Songsong Zhang.
2022. "Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array" Micromachines 13, no. 11: 1979.
https://doi.org/10.3390/mi13111979
APA Style
Xiu, X., Yang, H., Ji, M., Lv, H., & Zhang, S.
(2022). Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array. Micromachines, 13(11), 1979.
https://doi.org/10.3390/mi13111979