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Journal: MicromachinesVolume: 13Number: 1724
Article: Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer
- Authors:
- Shengjie Yao1,2,
- Jianping Yu1,2,* and
- Zhehe Yao2,*
- et al.
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