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Journal: Micromachines, 2022
Volume: 13
Number: 1601

Article: Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation
Authors: by Yongtao Li, Yi Wang, Hanyan Li, Bai Jiang, Fan Bai and Jinjun Feng
Link: https://www.mdpi.com/2072-666X/13/10/1601

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