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Journal: Micromachines, 2022
Volume: 13
Number: 1601
Article:
Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation
Authors:
by
Yongtao Li, Yi Wang, Hanyan Li, Bai Jiang, Fan Bai and Jinjun Feng
Link:
https://www.mdpi.com/2072-666X/13/10/1601
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