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Journal: Micromachines, 2022
Volume: 13
Number: 74
74
Article: Novel Fabrication Technology for Clamped Micron-Thick Titanium Diaphragms Used for the Packaging of an Implantable MEMS Acoustic Transducer
Authors: by Lukas Prochazka, Alexander Huber, Michael Schneider, Naureen Ghafoor, Jens Birch and Flurin Pfiffner
Link: https://www.mdpi.com/2072-666X/13/1/74

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