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Journal: Micromachines, 2021
Volume: 12
Number: 637

Article: The Effect of Nitrogen Incorporation on the Optical Properties of Si-Rich a-SiCx Films Deposited by VHF PECVD
Authors: by Hongliang Li, Zewen Lin, Yanqing Guo, Jie Song, Rui Huang and Zhenxu Lin
Link: https://www.mdpi.com/2072-666X/12/6/637

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