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Journal: Micromachines, 2021
Volume: 12
Number: 459

Article: CSRR-SICW High Sensitivity High Temperature Sensor Based on Si3N4 Ceramics
Authors: by Shujing Su, Ting Ren, Lili Zhang and Fujia Xu
Link: https://www.mdpi.com/2072-666X/12/4/459

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