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Journal: Micromachines, 2021
Volume: 12
Number: 414

Article: Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication
Authors: by Marta Maria Kluba, Jian Li, Katja Parkkinen, Marcus Louwerse, Jaap Snijder and Ronald Dekker
Link: https://www.mdpi.com/2072-666X/12/4/414

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