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Journal: Micromachines, 2021
Volume: 12
Number: 314
Article:
Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process
Authors:
by
Chih-Hsuan Lin, Chao-Hung Song and Kuei-Ann Wen
Link:
https://www.mdpi.com/2072-666X/12/3/314
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