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Journal: Micromachines, 2021
Volume: 12
Number: 1370
1370
Article: Low-Energy Pulsed Ion Beam Technology with Ultra-High Material Removal Resolution and Widely Adjustable Removal Efficiency
Authors: by Guangqi Zhou, Ye Tian, Feng Shi, Ci Song, Guipeng Tie, Gang Zhou, Lingbo Xie, Jianda Shao and Zhouling Wu
Link: https://www.mdpi.com/2072-666X/12/11/1370

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