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Journal: MicromachinesVolume: 12Number: 43
Article: Fabrication of Three-Dimensional Microvalves of Internal Nested Structures Inside Fused Silica
  • Authors:
  • Chao Shan1,
  • Qing Yang2 and
  • Hao Bian1
  • et al.
Link: https://www.mdpi.com/2072-666X/12/1/43

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