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Journal: Micromachines, 2020
Volume: 11
Number: 544
Article:
Orthogonal Experimental Research on Dielectrophoresis Polishing (DEPP) of Silicon Wafer
Authors:
by
Tianchen Zhao, Qianfa Deng, Cheng Zhang, Kaiping Feng, Zhaozhong Zhou and Julong Yuan
Link:
https://www.mdpi.com/2072-666X/11/6/544
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