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Micromachines2020, 11(4), 378;https://doi.org/10.3390/mi11040378

Journal: MicromachinesVolume: 11Number: 378

Article: Fabrication of Ultra-High Aspect Ratio (>420:1) Al₂O₃ Nanotube Arraysby Sidewall TransferMetal Assistant Chemical Etching

Authors:
Hailiang Li and
Changqing Xie^*

Link: https://www.mdpi.com/2072-666X/11/4/378

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