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Journal: Micromachines, 2020
Volume: 11
Number: 365

Article: Infinite Selectivity of Wet SiO2 Etching in Respect to Al
Authors: by Imrich Gablech, Jan Brodský, Jan Pekárek and Pavel Neužil
Link: https://www.mdpi.com/2072-666X/11/4/365

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