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Journal: Micromachines, 2020
Volume: 11
Number: 56
56
Article: Recent Progress of Miniature MEMS Pressure Sensors
Authors: by Peishuai Song, Zhe Ma, Jing Ma, Liangliang Yang, Jiangtao Wei, Yongmei Zhao, Mingliang Zhang, Fuhua Yang and Xiaodong Wang
Link: https://www.mdpi.com/2072-666X/11/1/56

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