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Journal: MicromachinesVolume: 10Number: 597
Article: Trajectory Definition with High Relative Accuracy (HRA) by Parametric Representation of Curves in Nano-Positioning Systems
- Authors:
- Lucía Díaz Pérez1,*,
- Beatriz Rubio Serrano2 and
- José A. Albajez García1
- et al.
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