Cai, S.; Li, W.; Zou, H.; Bao, H.; Zhang, K.; Wang, J.; Song, Z.; Li, X.
Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer. Micromachines 2019, 10, 227.
https://doi.org/10.3390/mi10040227
AMA Style
Cai S, Li W, Zou H, Bao H, Zhang K, Wang J, Song Z, Li X.
Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer. Micromachines. 2019; 10(4):227.
https://doi.org/10.3390/mi10040227
Chicago/Turabian Style
Cai, Shengran, Wei Li, Hongshuo Zou, Haifei Bao, Kun Zhang, Jiachou Wang, Zhaohui Song, and Xinxin Li.
2019. "Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer" Micromachines 10, no. 4: 227.
https://doi.org/10.3390/mi10040227
APA Style
Cai, S., Li, W., Zou, H., Bao, H., Zhang, K., Wang, J., Song, Z., & Li, X.
(2019). Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer. Micromachines, 10(4), 227.
https://doi.org/10.3390/mi10040227