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Journal: Micromachines, 2019
Volume: 10
Number: 102
Article:
Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH
Authors:
by
Milče M. Smiljanić, Žarko Lazić, Branislav Radjenović, Marija Radmilović-Radjenović and Vesna Jović
Link:
https://www.mdpi.com/2072-666X/10/2/102
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