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Journal: Micromachines, 2019
Volume: 10
Number: 102

Article: Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH
Authors: by Milče M. Smiljanić, Žarko Lazić, Branislav Radjenović, Marija Radmilović-Radjenović and Vesna Jović
Link: https://www.mdpi.com/2072-666X/10/2/102

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